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FOUP sensor Product List

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CANTOPS FOUP Sensor

Stable detection unaffected by light noise is possible with contact sensors! Designed for over 10 million high durability cycles.

This product is a sensor designed to be installed in load ports, STBs, stockers, and other semiconductor manufacturing equipment to detect wafer carriers (FOUP/FOSB/POD/MAC). Due to its contact type, it is not affected by surrounding light noise or electromagnetic noise, allowing for stable detection of the presence or absence of the target object. Additionally, it employs an optical detection mechanism internally, achieving durability of over 10 million cycles.

  • FOUP SENSOR.png
  • FOUP_Sensor.jpg
  • Other semiconductor manufacturing equipment
  • FOUP sensor

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